Influence of piezoelectric actuator on stability of nano/micromechanical device via Casimir force
Paper ID : 1322-ICNS
Fatemeh Tajik *1, Amir Ali Masoudi1, George Palasantzas2
1Department of Physics, Alzahra University, Tehran 1993891167, Iran
2Zernike Institute for Advanced Materials, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands
Here, we investigate dynamical actuation of a microswitch under the influence of the Casimir force via a piezoelectric actuator. In fact, we have considered the effect of optical properties on the stable operation of the microswitch for both good (e.g. metals) and poor conductors via a piezoelectric actuator. Indeed, gold (Au) has been chosen as a good conductor which is widely used for Casimir force measurements, and highly doped conductive silicon carbide (SiC) has been considered as a poor conductor which is a promising material for device operating under harsh environments. It is also supposed that the microswitches are frictionless and autonomous. Using bifurcation and pull-in diagrams, it has been shown that there is significant dependence of the performance of the microswitches on the in-plane extension in the piezoelectric actuator, due to applied voltage. The latter can preserve stability or lead to instability and stiction in both microswitches made from Au and SiC.
piezoelectric actuator; micro (nano) mechanical device; optical properties; Casimir force.
Status : Abstract Accepted (Poster Presentation)