Design of a Secondary Electron Detector by Smith-Purcell Principle
Paper ID : 1214-ICNS
Kamran Hosseini *1, Hadi Veladi2, Ali Pourziad2
1Faculty of Electrical & Computer Engineering/ University of Tabriz/ Tabriz/ Iran
2Faculty of Electrical & Computer Engineering
A structure for the detection of secondary electrons (SE) in scanning electron microscopes (SEM) is presented using Smith Purcell Radiation (SPR). The general structure includes collector, grating, accelerator and terahertz detector. The structure is designed in such a way that secondary electrons are used to collect urea with the help of a collector of ±200 V and is accelerated by the acceleration of the secondary electron to 10 keV. The accelerated electron beam of 10 keV energy is transmitted over a grating of 0.1565 λ length and a groove of width 0.0782 λ and depth 0.1565 λ. The light of a single wavelength λ=638.9μm is then radiated over the grating which structure can be detected by a terahertz detector. The generated terahertz radiation has important information from the sample. By detecting this radiation, the sex, shape, and type of sample can be identified and extracted by a secondary electron detector in an electron microscope.
Secondary Electron, Smith Purcell Radiation, Terahertz detector, Accelerated, Detector.
Status : Abstract Accepted (Poster Presentation)