Novel and fast fabrication of Hydrogen gas sensor based on WO3 nanorod structured layer, synthesized by Flame Vapor Deposition method
Paper ID : 1006-ICNS
Mehdi Torabi Goodarzi *1, Mehdi Ranjbar2, Hadi Salamti2
1Department of Physics, Isfahan University of Technology, Isfahan, Iran
2Department of Physics, Isfahan University of Technology, Isfahan 8415683111, Iran
In this paper, for the first time we demonstrate the employing of Flame Vapor Deposition (FVD) method as a fast, atmospheric and facile method for fabrication of metal oxide hydrogen gas sensors. For this purpose, nanorod structured tungsten oxide (WO3) layer is deposited on Inter Digital Electrode (IDE) coated Alumina substrate. Pure tungsten rod is used as feed precursor where located in certain location of oxy-hydrogen flame. The structural and elemental analysis confirms the successful formation of WO3 nanorods on substrate. The fabricated sensor is characterized under different temperatures range of 100-200○C and hydrogen concentrations range of 125-2500 ppm. there are significant responses for all of concentration and temperature ranges. But, by increasing the working temperature, the performance of the sensor has improved. which means, the response is increased and response time and recovery time is decreased. At optimum conditions (180○C), sensor can detect concentrations from 2500 ppm down to 15 ppm.
Tungsten Oxide; Hydrogen Sensor; FVD method
Status : Abstract Accepted (Oral Presentation)